On the interplay between a novel iron and iron-carbide atomic layer deposition process, the carbon nanotube growth, and the metal–carbon nanotube coating properties on silica substrates

نویسندگان

چکیده

The fabrication of iron and carbide nanoparticles (NPs) for catalytic reactions such as the growth carbon nanotubes (CNTs) compete with challenge covering a wide range substrates perfect control NP reactivity. We present in this work novel atomic layer deposition (ALD) process to grow Fe/Fe 3 C thin films over silica flat substrates. depositions were carried out exposing surface through various number ALD cycles, resulting Fe-based thicknesses ranging from 4 nm almost 40 nm. After thermal treatment, film dewetts into nanoparticles, where efficiency CNTs will depend on average size distribution nanocatalyst. X-ray diffraction x-ray photoelectron spectroscopy used track elemental, phase, shape (film particles) transformation order identify key features nanocatalyst, thereby controlling CNT nucleation growth. Thin thickness around 5 promotes dense forest. Furthermore, metal–CNT reveal optical properties that are totally tailored by initial cycles.

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ژورنال

عنوان ژورنال: Journal of vacuum science & technology

سال: 2022

ISSN: ['2327-9877', '0734-211X']

DOI: https://doi.org/10.1116/6.0001806